Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope

In capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation a...

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Bibliographic Details
Published in:Micromachines (Basel) 2023-09, Vol.14 (9), p.1755
Main Authors: Gao, Mingze, Sun, Jiangkun, Yu, Sheng, Feng, Jun, Ren, Xingjing, Zhang, Yongmeng, Wu, Xuezhong, Xiao, Dingbang
Format: Article
Language:English
Subjects:
Accumulation
charge accumulation
Dielectrics
Electric fields
Electrodes
frequency split
Frequency variation
High temperature
micro-shell resonator gyroscope
Microelectromechanical systems
Stiffness
stiffness axis
Substrates
Temperature effects
Vibration
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Summary:In capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation and characterization of charge accumulation, an accurate characterization method is needed to study the effect of charge and propose suppression methods. In this paper, we analyze the influence of charge accumulation on the MSRG and propose a characterization method for charge accumulation based on stiffness variation. Experiments are carried out to characterize the charge accumulation in MSRG, and the effect of temperature on the process is also investigated. In the experiment, the charge accumulation is characterized accurately by the variation of the frequency split and stiffness axes. Furthermore, the acceleration of the charge accumulation is observed at high temperatures, as is the higher additional voltage from the charge accumulation.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi14091755