A thin-film temperature sensor based on a flexible electrode and substrate

• Published in: Microsystems & nanoengineering 2021-06, Vol.7 (1), p.42-42, Article 42
• Main Authors: Liu, Zhaojun, Tian, Bian, Zhang, Bingfei, Liu, Jiangjiang, Zhang, Zhongkai, Wang, Song, Luo, Yunyun, Zhao, Libo, Shi, Peng, Lin, Qijing, Jiang, Zhuangde
• Format: Article
• Language: English
• Subjects: 639/166/987; 639/766; Component reliability; Design optimization; Design parameters; Dimensional stability; Engineering; Indium oxides; Process parameters; Sensors; Structural design; Substrates; Temperature; Temperature sensors; Thermocouples; Thin films
• ISSN: 2055-7434; 2096-1030; 2055-7434
• DOI: 10.1038/s41378-021-00271-0

Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.