Imaging with a Commercial Electron Backscatter Diffraction (EBSD) Camera in a Scanning Electron Microscope: A Review

Scanning electron microscopy is widespread in field of material science and research, especially because of its high surface sensitivity due to the increased interactions of electrons with the target material’s atoms compared to X-ray-oriented methods. Among the available techniques in scanning elec...

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Bibliographic Details
Published in:Journal of imaging 2018-07, Vol.4 (7), p.88
Main Authors: Brodusch, Nicolas, Demers, Hendrix, Gauvin, Raynald
Format: Article
Language:English
Subjects:
Cameras
Crystal structure
Crystallinity
Crystallography
dark-field (DF)
deformation
Diffraction patterns
Electron backscatter diffraction
electron backscatter diffraction (EBSD)
electron channeling contrast imaging (ECCI)
electron channeling pattern (ECP)
Electron microscopes
Energy
Imaging
Magnetic domains
Nanostructured materials
Organic chemistry
Post-production processing
scanning electron microscope (SEM)
Scanning electron microscopy
t-EBSD
t-EFSD
transmission kikuchi diffraction (TKD
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Summary:Scanning electron microscopy is widespread in field of material science and research, especially because of its high surface sensitivity due to the increased interactions of electrons with the target material’s atoms compared to X-ray-oriented methods. Among the available techniques in scanning electron microscopy (SEM), electron backscatter diffraction (EBSD) is used to gather information regarding the crystallinity and the chemistry of crystalline and amorphous regions of a specimen. When post-processing the diffraction patterns or the image captured by the EBSD detector screen which was obtained in this manner, specific imaging contrasts are generated and can be used to understand some of the mechanisms involved in several imaging modes. In this manuscript, we reviewed the benefits of this procedure regarding topographic, compositional, diffraction, and magnetic domain contrasts. This work shows preliminary and encouraging results regarding the non-conventional use of the EBSD detector. The method is becoming viable with the advent of new EBSD camera technologies, allowing acquisition speed close to imaging rates. This method, named dark-field electron backscatter diffraction imaging, is described in detail, and several application examples are given in reflection as well as in transmission modes.
ISSN:2313-433X
2313-433X
DOI:10.3390/jimaging4070088