Precision Optical Metrology and Smart Sensing

Optics, renowned for its non-contact measurement capabilities, versatility, and high sensitivity, is recognized as a powerful tool driving the technological evolution of precision metrology [...].

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2024-10, Vol.24 (21), p.6816
Main Authors: Zhang, Xiangchao, Wang, Jian, Wang, Yajun
Format: Article
Language:English
Subjects:
Accuracy
Algorithms
Artificial intelligence
Automation
Deformation
Design specifications
Environmental monitoring
Instrument industry
Integrated circuit fabrication
Measurement techniques
n/a
Optimization
Science
Semiconductor industry
Signal processing
Technology application
Topography
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Description
Summary:Optics, renowned for its non-contact measurement capabilities, versatility, and high sensitivity, is recognized as a powerful tool driving the technological evolution of precision metrology [...].
ISSN:1424-8220
1424-8220
DOI:10.3390/s24216816