Characterization of Shear Horizontal Waves Using a 1D Laser Doppler Vibrometer

We developed a new technique for the detection of shear horizontal surface acoustic waves (SH-SAW) using a one-dimensional laser-based Doppler vibrometer. It measures the out-of-plane surface deformation at the fingertip of an interdigitated transducer (the boundary of the wave aperture) and uses it...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2021-04, Vol.21 (7), p.2467
Main Authors: Elhady, Alaa, Abdel-Rahman, Eihab M
Format: Article
Language:English
Subjects:
Aperture
Bleustein–Gulyaev waves
Communication
Decay rate
Deformation
Laser applications
Laser doppler vibrometers
Lasers
MEMS characterization
Poisson's ratio
SAW detection
Saws
SH waves
Shear strain
Surface acoustic waves
vibrometer
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Summary:We developed a new technique for the detection of shear horizontal surface acoustic waves (SH-SAW) using a one-dimensional laser-based Doppler vibrometer. It measures the out-of-plane surface deformation at the fingertip of an interdigitated transducer (the boundary of the wave aperture) and uses it to estimate the instantaneous in-plane displacement field given the substrate Poisson ratio. It can also estimate the degree of surface confinement (wave decay rate). The proposed approach was first verified using finite element analysis (FEA) and demonstrated experimentally using a Bleustein-Gulyaev resonator.
ISSN:1424-8220
1424-8220
DOI:10.3390/s21072467