Tunable microwave plasma coaxial resonator

We report the design, performance, and characterization of a tunable microwave plasma resonator based on a coaxial transmission line structure operated at atmospheric pressure. The adjustable tuners of the compact device enable over 20 dB enhancement of reflection coefficient by counterbalancing the...

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Bibliographic Details
Published in:AIP advances 2021-10, Vol.11 (10), p.105014-105014-5
Main Authors: Lee, Jimo, Yun, Gunsu S.
Format: Article
Language:English
Subjects:
Electrons
Impedance
Microwave plasmas
Plasma
Plasma jets
Reflectance
Resonators
Transmission lines
Tuners
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Description
Summary:We report the design, performance, and characterization of a tunable microwave plasma resonator based on a coaxial transmission line structure operated at atmospheric pressure. The adjustable tuners of the compact device enable over 20 dB enhancement of reflection coefficient by counterbalancing the impedance mismatch. The in situ tuning capability can also neutralize the sudden change in impedance upon plasma discharge, elongating the microwave driven plasma plume. It is observed that the fine adjustment of two small bolts can maintain a high device efficiency up to 96% with plasma load impedance, and a wide operation range can be covered by a single device.
ISSN:2158-3226
2158-3226
DOI:10.1063/5.0064577