Fabrication of depletion type micro-ring modulator with high extinction ratio and high coupling quality factor

We experimentally demonstrate an optical micro-ring modulator based on a reverse-biased PN junction which is integrated into a silicon-on-insulator (SOI) rib waveguide. The performance of micro-ring resonator with different sizes is simulated with Lumerical MODE Solutions. The fabricated device prov...

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Bibliographic Details
Published in:MATEC web of conferences 2017-01, Vol.139, p.66
Main Authors: Shen, Yun, Wang, Xiaodong, Zhang, Wei, Qiu, Ciyuan, Cheng, Xiulan
Format: Article
Language:English
Subjects:
Coupling
Extinction
Modulation
P-n junctions
Q factors
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Summary:We experimentally demonstrate an optical micro-ring modulator based on a reverse-biased PN junction which is integrated into a silicon-on-insulator (SOI) rib waveguide. The performance of micro-ring resonator with different sizes is simulated with Lumerical MODE Solutions. The fabricated device provides a high extinction ratio (ER) of 20 dB and coupling quality factor (Q) 2*104. Modulation rate is higher than 11 Gbit/s with only 2 V peak-to-peak (Vpp) driving voltage. The theoretical modulation rate can be higher than 25 Gbit/s by the optimizing the matching resistor and the test system.
ISSN:2261-236X
2274-7214
2261-236X
DOI:10.1051/matecconf/201713900066