Comparison of Sb2O3 and Sb2O3/SiO2 Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure

In this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb2O3/SiO2 double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb2O3/SiO2 double stacked membranes with appropriate annealing had better material quality and sensing performanc...

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Bibliographic Details
Published in:Membranes (Basel) 2022-07, Vol.12 (8), p.734
Main Authors: Kao, Chyuan-Haur, Chen, Kuan-Lin, Wu, Hui-Ru, Cheng, Yu-Chin, Chen, Cheng-Shan, Chen, Shih-Ming, Lee, Ming-Ling, Chen, Hsiang
Format: Article
Language:English
Subjects:
Annealing
Antimony trioxide
Crystallization
Defects
Membranes
pH effects
pH sensing
Photoelectron spectroscopy
Photoelectrons
reiability
Sb2O3/SiO2 double stack
Scanning electron microscopy
Semiconductors
Sensors
silicate
Silicon dioxide
Silicon wafers
Spectrum analysis
X ray photoelectron spectroscopy
X-ray diffraction
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Summary:In this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb2O3/SiO2 double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb2O3/SiO2 double stacked membranes with appropriate annealing had better material quality and sensing performance than Sb2O3 membranes did. To investigate the influence of double stack and annealing, multiple material characterizations and sensing measurements on membranes including of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM) were conducted. These analyses indicate that double stack could enhance crystallization and grainization, which reinforced the surface sites on the membrane. Therefore, the sensing capability could be enhanced, Sb2O3/SiO2-based with appropriate annealing show promises for future industrial ion sensing devices.
ISSN:2077-0375
2077-0375
DOI:10.3390/membranes12080734