Built-In Self-Test (BIST) Methods for MEMS: A Review

A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during sy...

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Bibliographic Details
Published in:Micromachines (Basel) 2020-12, Vol.12 (1), p.40
Main Authors: Hantos, Gergely, Flynn, David, Desmulliez, Marc P Y
Format: Article
Language:English
Subjects:
Accelerometers
Built in test
built-in-self-test (BIST)
Embedded systems
failure modes
Field tests
Integrated circuits
Mechanical systems
micro-electro-mechanical systems (MEMS) test
Microelectromechanical systems
multi-functional sensors
Performance measurement
Power consumption
Review
Self tests
Sensors
Taxonomy
Test methods
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Summary:A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during system operation are being actively sought after. After an extensive review of the various testing methods, a classification table is provided that benchmarks such methods according to four performance metrics: ease of implementation, usefulness, test duration and power consumption. The performance table provides also the domain of application of the method that includes field test, power-on test or assembly phase test. Although BIST methods are application dependent, the use of the inherent multi-modal sensing capability of most sensors offers interesting prospects for effective BIST, as well as built-in self-repair (BISR).
ISSN:2072-666X
2072-666X
DOI:10.3390/mi12010040