Effect of substrate temperature on the properties of Bi2O3 thin films grown by sol-gel spray coating

• Published in: Results in engineering 2023-03, Vol.17, p.100991, Article 100991
• Main Authors: Ilsatoham, Moh Iir, Alkian, Ilham, Azzahra, Griszha, Hidayanto, Eko, Sutanto, Heri
• Format: Article
• Language: English
• Subjects: Bi2O3; Sol-gel; Spray coating; Thin film
• ISSN: 2590-1230; 2590-1230
• DOI: 10.1016/j.rineng.2023.100991

Bi2O3 thin films have been successfully deposited on glass substrate by sol-gel spray coating technique at different temperatures between 150 °C and 550 °C using bismuth nitrate pentahydrate as raw material. Thin films were then annealed at a temperature of 350 °C. This study aims to analyze the effect of substrate temperature on the structural, morphological, topological, and optical properties by X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), and UV–Vis Spectroscopy. The diffraction peak position of XRD showed that the as-obtained Bi2O3 thin films were crystalline and different substrate temperatures played a key role in the phase transition β→δ-Bi2O3. The morphology and topology of Bi2O3 show different results which are highly influenced by substrate temperatures whereas Bi2O3 thin film at 450 °C has the highest value of surface roughness. The skewness and kurtosis were also investigated. The optical study showed the band gap energy values of the as-obtained Bi2O3 thin film varied at different substrate temperatures between 2.35 eV and 2.78 eV. •The Bi2O3 thin films were deposited by the sol-gel spray coating technique method.•The quality of Bi2O3 thin films has characterized by crystallinity, morphology, and optical properties.