Resonant Adaptive MEMS Mirror

A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs...

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Bibliographic Details
Published in:Actuators 2022-08, Vol.11 (8), p.224
Main Authors: Kamel, Amr, Kocer, Samed, Mukhangaliyeva, Lyazzat, Saritas, Resul, Gulsaran, Ahmet, Elhady, Alaa, Basha, Mohamed, Hajireza, Parsin, Yavuz, Mustafa, Abdel-Rahman, Eihab
Format: Article
Language:English
Subjects:
Actuation
Algorithms
Circular plates
Coma
Deformable mirrors
Electrodes
Formability
Lasers
Microelectromechanical systems
Micromachining
Microscopy
Modal analysis
Ophthalmology
resonant electrostatic actuation
Resonant frequencies
Springs (elastic)
wavefront aberration
Zernike modes
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Summary:A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs, it uses resonant electrostatic actuation (REA) to realize low- and high-order Zernike modes with a single drive signal. Instead of the hundreds or thousands of electrodes deployed by traditional DMs, the proposed DM employs only 49 electrodes and eliminates the need for spatial control algorithms and associated hardware, thereby providing a compact low-cost alternative. It also exploits dynamic amplification to reduce power requirements and increase the stroke by driving the DM at resonance. The DM was fabricated using a commercial silicon-on-insulator (SOI) MEMS process. Experimental modal analysis was carried out using laser Doppler vibrometry (LDV) to identify mode shapes of the DM and their natural frequencies. We are able to observe all of the lowest eight Zernike modes.
ISSN:2076-0825
2076-0825
DOI:10.3390/act11080224