Coupling of RF antennas to large volume helicon plasma

Large volume helicon plasma sources are of particular interest for large scale semiconductor processing, high power plasma propulsion and recently plasma-material interaction under fusion conditions. This work is devoted to studying the coupling of four typical RF antennas to helicon plasma with inf...

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Bibliographic Details
Published in:AIP advances 2018-04, Vol.8 (4), p.045016-045016-9
Main Authors: Chang, Lei, Hu, Xinyue, Gao, Lei, Chen, Wei, Wu, Xianming, Sun, Xinfeng, Hu, Ning, Huang, Chongxiang
Format: Article
Language:English
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Summary:Large volume helicon plasma sources are of particular interest for large scale semiconductor processing, high power plasma propulsion and recently plasma-material interaction under fusion conditions. This work is devoted to studying the coupling of four typical RF antennas to helicon plasma with infinite length and diameter of 0.5 m, and exploring its frequency dependence in the range of 13.56-70 MHz for coupling optimization. It is found that loop antenna is more efficient than half helix, Boswell and Nagoya III antennas for power absorption; radially parabolic density profile overwhelms Gaussian density profile in terms of antenna coupling for low-density plasma, but the superiority reverses for high-density plasma. Increasing the driving frequency results in power absorption more near plasma edge, but the overall power absorption increases with frequency. Perpendicular stream plots of wave magnetic field, wave electric field and perturbed current are also presented. This work can serve as an important reference for the experimental design of large volume helicon plasma source with high RF power.
ISSN:2158-3226
2158-3226
DOI:10.1063/1.5025510