Optical MEMS devices for compact 3D surface imaging cameras

Implementing 3D surface imaging camera systems into miniaturized devices for a variety of 3D applications such as movement recognition, object sensing, and 3D endoscopy has received great attention over the past decade. Recently, various MEMS techniques enabled the fabrication of key optical element...

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Bibliographic Details
Published in:Micro and nano systems letters 2019-07, Vol.7 (1), p.1-9, Article 8
Main Authors: Yang, Sung-Pyo, Seo, Yeong-Hyeon, Kim, Jae-Beom, Kim, Hyunwoo, Jeong, Ki-Hun
Format: Article
Language:English
Subjects:
3D surface imaging camera
Applied and Technical Physics
Cameras
Circuits and Systems
Electrical Engineering
Engineering
Imaging
Imaging techniques
Mechanical Engineering
Microelectromechanical systems
Motion perception
Nanotechnology
Object recognition
Optical components
Optical MEMS
Review
Stereoscopic
Structured light
Three dimensional motion
Time-of-flight
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Summary:Implementing 3D surface imaging camera systems into miniaturized devices for a variety of 3D applications such as movement recognition, object sensing, and 3D endoscopy has received great attention over the past decade. Recently, various MEMS techniques enabled the fabrication of key optical elements for 3D surface imaging with compact size, reasonable cost, and high yield. This article will overview the principles of major categories of 3D surface imaging techniques and their applications using optical MEMS devices for compact 3D surface imaging camera.
ISSN:2213-9621
2213-9621
DOI:10.1186/s40486-019-0087-4