Novel Method for Electroless Etching of 6H-SiC

In this article, we report an electroless method to fabricate porous hexagonal silicon carbide and hexagonal silicon carbide nanoparticles (NPs) as small as 1 nm using wet chemical stain etching. We observe quantum confinement effect for ultrasmall hexagonal SiC NPs in contrast to the cubic SiC NPs....

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Bibliographic Details
Published in:Nanomaterials (Basel, Switzerland) Switzerland), 2020-03, Vol.10 (3), p.538
Main Authors: Károlyházy, Gyula, Beke, Dávid, Zalka, Dóra, Lenk, Sándor, Krafcsik, Olga, Kamarás, Katalin, Gali, Ádám
Format: Article
Language:English
Subjects:
chemical etching
nanoparticles
photoluminescence spectroscopy
silicon carbide
x-ray photoemission spectroscopy
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Summary:In this article, we report an electroless method to fabricate porous hexagonal silicon carbide and hexagonal silicon carbide nanoparticles (NPs) as small as 1 nm using wet chemical stain etching. We observe quantum confinement effect for ultrasmall hexagonal SiC NPs in contrast to the cubic SiC NPs. We attribute this difference to the various surface terminations of the two polytypes of SiC NPs.
ISSN:2079-4991
2079-4991
DOI:10.3390/nano10030538