Graphene-Based Nanoscale Vacuum Channel Transistor

We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage and adhesiv...

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Bibliographic Details
Published in:Nanoscale research letters 2018-10, Vol.13 (1), p.311-8, Article 311
Main Authors: Xu, Ji, Gu, Zhuyan, Yang, Wenxin, Wang, Qilong, Zhang, Xiaobing
Format: Article
Language:English
Subjects:
Chemistry and Materials Science
Electron beam lithography
Electron microscopes
Fabrication
Graphene
In situ measurement
Leakage current
Materials Science
Molecular Medicine
Nano Express
Nanochannels
Nanochemistry
Nanoscale Science and Technology
Nanoscale vacuum channel
Nanotechnology
Nanotechnology and Microengineering
Optimization
Scanning electron microscopy
Transistors
Ultrasonic cleaning
Vacuum
Vacuum chambers
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Summary:We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage and adhesive residue on graphene are carried out by ultrasonic cleaning and thermal annealing. Additionally, in situ electric characteristics are directly performed inside a vacuum chamber of scanning electron microscope (SEM) with the nanomanipulator. By modulating the gate voltage, the NVCT could be switched from off-state to on-state, exhibiting an on/off current ratio up to 10 2 with low working voltages (
ISSN:1931-7573
1556-276X
DOI:10.1186/s11671-018-2736-6