Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control

In this paper, in order to perform delicate and advanced grip control like human, a proximity and tactile combination sensor using miniaturized microcantilevers one-fifth the size of previous one as the detection part was newly developed. Microcantilevers were arranged with higher spatial density th...

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Bibliographic Details
Published in:Micromachines (Basel) 2018-06, Vol.9 (6), p.301
Main Authors: Araki, Ryoma, Abe, Takashi, Noma, Haruo, Sohgawa, Masayuki
Format: Article
Language:English
Subjects:
Automation
Contact force
Design
Electrodes
Force distribution
International conferences
microcantilever
Microelectromechanical systems
Miniaturization
Proximity
proximity sensor
Robotics
Robots
Sensitivity enhancement
Sensors
slipping detection
Spatial distribution
Stress concentration
tactile sensor
Tactile sensors (robotics)
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Summary:In this paper, in order to perform delicate and advanced grip control like human, a proximity and tactile combination sensor using miniaturized microcantilevers one-fifth the size of previous one as the detection part was newly developed. Microcantilevers were arranged with higher spatial density than in previous works and an interdigitated array electrode to enhance light sensitivity was added. It is found that the interdigitated array electrode can detect light with 1.6 times higher sensitivity than that in previous works and the newly fabricated microcantilevers have enough sensitivity to applied normal and shear loads. Therefore, more accurate detection of proximity distance and spatial distribution of contact force become available for dexterous gripping control to prevent 'overshooting', 'force control error', and 'slipping'.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi9060301