A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator

The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S1 mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonator...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2022-08, Vol.22 (15), p.5912
Main Authors: Luo, Tiancheng, Liu, Wenjuan, Wen, Zhiwei, Xie, Ying, Tong, Xin, Cai, Yao, Liu, Yan, Sun, Chengliang
Format: Article
Language:English
Subjects:
Acoustics
biosensor
Biosensors
Communication
Coronaviruses
Figure of merit
Finite element analysis
high-sensitivity
Lamb wave
Lamb waves
Lithium niobates
Polymethyl methacrylate
Radiation
Resonators
S1 mode
Sensitivity
Sensors
Thin films
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Summary:The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S1 mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonators, based on a 400-nm X-cut lithium niobate film, showed a resonance frequency over 8 GHz. Moreover, a PMMA layer was used as the mass-sensing layer, to study the performance of the biosensors based on HF-LWRs. Through optimizing the thickness of the lithium niobate film and the electrode configuration, the mass sensitivity of the biosensor could reach up to 74,000 Hz/(ng/cm2), and the maximum value of figure of merit (FOM) was 5.52 × 107, which shows great potential for pushing the performance boundaries of gravimetric-sensitive acoustic biosensors.
ISSN:1424-8220
1424-8220
DOI:10.3390/s22155912