A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator

The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S1 mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonator...

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Published in:Sensors (Basel, Switzerland) Switzerland), 2022-08, Vol.22 (15), p.5912
Main Authors: Luo, Tiancheng, Liu, Wenjuan, Wen, Zhiwei, Xie, Ying, Tong, Xin, Cai, Yao, Liu, Yan, Sun, Chengliang
Format: Article
Language:English
Subjects:
Acoustics
biosensor
Biosensors
Communication
Coronaviruses
Figure of merit
Finite element analysis
high-sensitivity
Lamb wave
Lamb waves
Lithium niobates
Polymethyl methacrylate
Radiation
Resonators
S1 mode
Sensitivity
Sensors
Thin films
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cited_by cdi_FETCH-LOGICAL-c446t-68cde5f035294e3ee1cc6c3cb99b44d1f958cd1f60f55109fdc210e0e3de495f3
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container_end_page
container_issue 15
container_start_page 5912
container_title Sensors (Basel, Switzerland)
container_volume 22
creator Luo, Tiancheng
Liu, Wenjuan
Wen, Zhiwei
Xie, Ying
Tong, Xin
Cai, Yao
Liu, Yan
Sun, Chengliang
description The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S1 mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. The fabricated resonators, based on a 400-nm X-cut lithium niobate film, showed a resonance frequency over 8 GHz. Moreover, a PMMA layer was used as the mass-sensing layer, to study the performance of the biosensors based on HF-LWRs. Through optimizing the thickness of the lithium niobate film and the electrode configuration, the mass sensitivity of the biosensor could reach up to 74,000 Hz/(ng/cm2), and the maximum value of figure of merit (FOM) was 5.52 × 107, which shows great potential for pushing the performance boundaries of gravimetric-sensitive acoustic biosensors.
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subjects Acoustics
biosensor
Biosensors
Communication
Coronaviruses
Figure of merit
Finite element analysis
high-sensitivity
Lamb wave
Lamb waves
Lithium niobates
Polymethyl methacrylate
Radiation
Resonators
S1 mode
Sensitivity
Sensors
Thin films
title A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator
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