Preparation and properties of different dielectric films with Al metal electrode

Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root‐mean‐square (RMS) and peak‐to‐valley roughness of Al electrodes were characterised by atomic force microscopy (A...

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Bibliographic Details
Published in:IET Nanodielectrics 2022-09, Vol.5 (3-4), p.125-131
Main Authors: Dong, Qi, Zhong, Shao‐Long, Feng, Qi‐Kun, Zheng, Ming‐Sheng, Ping, Jiang‐Bo, Dang, Zhi‐Min
Format: Article
Language:English
Subjects:
Electrical resistivity
Electrodes
Energy storage
Grain boundaries
Grain size
Islands
Morphology
Polyethylene terephthalate
Roughness
Substrates
Thickness
Vacuum evaporation
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Summary:Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root‐mean‐square (RMS) and peak‐to‐valley roughness of Al electrodes were characterised by atomic force microscopy (AFM). It was found that the PET and PI substrates showed the reduced threshold thickness of the continuous growth of Al electrodes compared with the PP substrate. The sheet resistance of Al electrodes decreases with the increase of peak‐to‐valley roughness. The current surge capability of the Al electrode decreases with the increase of RMS roughness. The Al electrode deposited on the PET film has higher sheet resistance and better current carrying capability, and the self‐healing performance of metallised film is also excellent among three kinds of films.
ISSN:2514-3255
2514-3255
DOI:10.1049/nde2.12037