Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)

In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2009-03, Vol.9 (3), p.1382-1393
Main Authors: Tian, Bian, Zhao, Yulong, Jiang, Zhuangde, Zhang, Ling, Liao, Nansheng, Liu, Yuanhao, Meng, Chao
Format: Article
Language:English
Subjects:
FEM
Piezoresistive
Pressure sensor
Review
TPMS
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Summary:In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.
ISSN:1424-8220
1424-8220
DOI:10.3390/s90301382