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Low-temperature synthesis and growth model of thin Mo2C crystals on indium
Chemical vapor deposition is a promising technique to produce Mo 2 C crystals with large area, controlled thickness, and reduced defect density. Typically, liquid Cu is used as a catalyst substrate; however, its high melting temperature (1085 °C) prompted research groups to search for alternatives....
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Published in: | Scientific reports 2021-04, Vol.11 (1), p.8247-8247, Article 8247 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Chemical vapor deposition is a promising technique to produce Mo
2
C crystals with large area, controlled thickness, and reduced defect density. Typically, liquid Cu is used as a catalyst substrate; however, its high melting temperature (1085 °C) prompted research groups to search for alternatives. In this study, we report the synthesis of large-area thin Mo
2
C crystals at lower temperatures using liquid In, which is also advantageous with respect to the transfer process due to its facile etching. SEM, EDS, Raman spectroscopy, XPS, and XRD studies show that hexagonal Mo
2
C crystals, which are orthorhombic, grow along the [100] direction together with an amorphous carbon thin film on In. The growth mechanism is examined and discussed in detail, and a model is proposed. AFM studies agree well with the proposed model, showing that the vertical thickness of the Mo
2
C crystals decreases inversely with the thickness of In for a given reaction time. |
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ISSN: | 2045-2322 2045-2322 |
DOI: | 10.1038/s41598-021-87660-7 |