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Correlation between the Surface Undulation and Luminescence Characteristics in Semi-Polar InGaN/GaN Multi-Quantum Wells

Surface undulation was formed while growing InGaN/GaN multi-quantum wells on a semi-polar m-plane (1–100) sapphire substrate. Two distinct facets, parallel to (112¯2) and (011¯1), were formed in the embedded multi-quantum wells (MQWs). The structural and luminescence characteristics of the two facet...

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Bibliographic Details
Published in:Nanomaterials (Basel, Switzerland) Switzerland), 2023-06, Vol.13 (13), p.1946
Main Authors: Sheen, Mi-Hyang, Lee, Yong-Hee, Jang, Jongjin, Baek, Jongwoo, Nam, Okhyun, Yang, Cheol-Woong, Kim, Young-Woon
Format: Article
Language:English
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Summary:Surface undulation was formed while growing InGaN/GaN multi-quantum wells on a semi-polar m-plane (1–100) sapphire substrate. Two distinct facets, parallel to (112¯2) and (011¯1), were formed in the embedded multi-quantum wells (MQWs). The structural and luminescence characteristics of the two facets were investigated using transmission electron microscopy equipped with cathodoluminescence. Those well-defined quantum wells, parallel and slanted to the growth plane, showed distinct differences in indium incorporation from both the X-ray yield and the contrast difference in annular darkfield images. Quantitative measurements of concentration in (011¯1) MQWs show an approximately 4 at% higher indium incorporation compared to the corresponding (112¯2) when the MQWs were formed under the same growth condition.
ISSN:2079-4991
2079-4991
DOI:10.3390/nano13131946