Surface Nanotexturing of Boron-Doped Diamond Films by Ultrashort Laser Pulses

Polycrystalline boron-doped diamond (BDD) films were surface nanotextured by femtosecond pulsed laser irradiation (100 fs duration, 800 nm wavelength, 1.44 J cm single pulse fluence) to analyse the evolution of induced alterations on the surface morphology and structural properties. The aim was to i...

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Published in:Micromachines (Basel) 2023-02, Vol.14 (2), p.389
Main Authors: Mastellone, Matteo, Bolli, Eleonora, Valentini, Veronica, Orlando, Stefano, Lettino, Antonio, Polini, Riccardo, Buijnsters, Josephus Gerardus, Bellucci, Alessandro, Trucchi, Daniele Maria
Format: Article
Language:English
Subjects:
Ablation
Boron
boron-doped diamond
Chemical reactions
Chemical vapor deposition
Diamond films
Electrochemical reactions
Energy
Femtosecond pulsed lasers
Fluence
Irradiation
laser texturing
Lasers
LIPSS
Long range order
Microelectromechanical systems
Morphology
Radiation
Raman spectroscopy
ripples
Scanning electron microscopy
Silicon wafers
Software
surface functionalization
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cited_by cdi_FETCH-LOGICAL-c511t-203b35d6903ea15d5596fc0490193b3f5f87f7507bcf5285f1e3d96eea0507183
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creator Mastellone, Matteo
Bolli, Eleonora
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Polini, Riccardo
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Bellucci, Alessandro
Trucchi, Daniele Maria
description Polycrystalline boron-doped diamond (BDD) films were surface nanotextured by femtosecond pulsed laser irradiation (100 fs duration, 800 nm wavelength, 1.44 J cm single pulse fluence) to analyse the evolution of induced alterations on the surface morphology and structural properties. The aim was to identify the occurrence of laser-induced periodic surface structures (LIPSS) as a function of the number of pulses released on the unit area. Micro-Raman spectroscopy pointed out an increase in the graphite surface content of the films following the laser irradiation due to the formation of ordered carbon sites with respect to the pristine sample. SEM and AFM surface morphology studies allowed the determination of two different types of surface patterning: narrow but highly irregular ripples without a definite spatial periodicity or long-range order for irradiations with relatively low accumulated fluences (
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subjects Ablation
Boron
boron-doped diamond
Chemical reactions
Chemical vapor deposition
Diamond films
Electrochemical reactions
Energy
Femtosecond pulsed lasers
Fluence
Irradiation
laser texturing
Lasers
LIPSS
Long range order
Microelectromechanical systems
Morphology
Radiation
Raman spectroscopy
ripples
Scanning electron microscopy
Silicon wafers
Software
surface functionalization
title Surface Nanotexturing of Boron-Doped Diamond Films by Ultrashort Laser Pulses
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