Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-cura...

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Bibliographic Details
Published in:Journal of Advanced Mechanical Design, Systems, and Manufacturing Systems, and Manufacturing, 2018, Vol.12(5), pp.JAMDSM0101-JAMDSM0101
Main Authors: UNNO, Noriyuki, KAKIMOTO, Shohei, MÄKELÄ, Tapio, HIWASA, Shin, TANIGUCHI, Jun
Format: Article
Language:English
Subjects:
Molds
Release agent-free
Release agents
Replica mold
Resins
Thermal roll-to-roll nanoimprint
Thermoplastic pattern
Ultraviolet radiation
UV-curable resin
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Summary:Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.
ISSN:1881-3054
1881-3054
DOI:10.1299/jamdsm.2018jamdsm0101