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Planar Micro-Positioning Device Based on a 3D Digital Electromagnetic Actuator

In this paper, a novel micro-positioning device based on a 3D digital actuator is presented. The proposed system allows realizing planar motions of micro-objects, which could be implemented in several applications where micro-positioning tasks are needed such as micro-component manufacturing/assembl...

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Bibliographic Details
Published in:Actuators 2021-12, Vol.10 (12), p.310
Main Authors: Deshmukh, Ajinkya, Petit, Laurent, Khan, Muneeb-ullah, Lamarque, Frédéric, Prelle, Christine
Format: Article
Language:English
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Summary:In this paper, a novel micro-positioning device based on a 3D digital actuator is presented. The proposed system allows realizing planar motions of micro-objects, which could be implemented in several applications where micro-positioning tasks are needed such as micro-component manufacturing/assembly, biomedicine, scanning microscopy, etc. The device has three degrees of freedom, and it is able to achieve planar motions of a mobile plate in the xy-plane at two different levels along the z-axis. It consists of a hexagonal mobile part composed of a permanent magnet that can reach twelve discrete positions distributed between two z-axis levels (six at each level). Two different approaches are presented to perform positioning tasks of the plate using the digital actuator: the stick-slip and the lift-mode approaches. A comparison between these two approaches is provided on the basis of the plate displacement with respect to different current values and conveyed mass. It was observed that for a current of 2 A, the actuator is able to displace a mass of 1.15 g over a distance of 0.08 mm. The optimal positioning range of the planar device was found to be ±5.40 mm and ±7.05 mm along the x- and y-axis, respectively.
ISSN:2076-0825
2076-0825
DOI:10.3390/act10120310