A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions

We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in...

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Bibliographic Details
Published in:Microsystems & nanoengineering 2023-04, Vol.9 (1), p.47-11, Article 47
Main Authors: Levine, Zachary H., Alpert, Bradley K., Dagel, Amber L., Fowler, Joseph W., Jimenez, Edward S., Nakamura, Nathan, Swetz, Daniel S., Szypryt, Paul, Thompson, Kyle R., Ullom, Joel N.
Format: Article
Language:English
Subjects:
639/766
639/925/927/1007
Chemical elements
Circuit design
Computed tomography
Electron beams
Engineering
Image processing
Image reconstruction
Integrated circuits
Laboratories
Process controls
R&D
Radiation
Research & development
Tomography
X ray detectors
X ray imagery
X-rays
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Summary:We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample. The x-ray generation target, a layer of platinum, is fabricated on the circuit wafer itself. A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit. The reconstruction is consistent with the circuit’s design file.
ISSN:2055-7434
2096-1030
2055-7434
DOI:10.1038/s41378-023-00510-6