Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process

• Published in: Engineering (Beijing, China) China), 2024-04, Vol.35, p.46-55
• Main Authors: Yu, Mingzhi, Chen, Yao, Wang, Yongliang, Han, Xiangguang, Luo, Guoxi, Zhao, Libo, Wang, Yanbin, Ma, Yintao, Lu, Shun, Yang, Ping, Lin, Qijing, Wang, Kaifei, Jiang, Zhuangde
• Format: Article
• Language: English
• Subjects: Inner-sidewall molding; Microfabricated atomic vapor cells; Multiple optical channels; Quantum sensing
• ISSN: 2095-8099
• DOI: 10.1016/j.eng.2023.08.016

[Display omitted] •Microfabricated atomic vapor cells with multi-optical channels.•Innovative precision inner-sidewalls molding process.•Testing results of the vapor cell prove the effectiveness of the process. Existing microfabricated atomic vapor cells have only one optical channel, which is insufficient for supporting the multiple orthogonal beams required by atomic devices. In this study, we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an innovative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements. Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel. In addition, the construction of an integrated processing platform enables multilayer non-isothermal anode bonding, the filling of inert gases, and the recovery and recycling of noble gases. Measurements of the absorption spectra and free-induction decay signals of xenon-129 (129Xe) and xenon-131 (131Xe) under different pump-probe schemes demonstrate the suitability of our vapor cell for use in atomic devices including atomic gyroscopes, dual-beam atomic magnetometers, and other optical/atomic devices. The proposed micromolding technology has broad application prospects in the field of optical-device processing.