Precision Auto-Focusing Apparatus Based on Long-Working-Distance, Wide-Spectrum Microscope

A mirror-based Schwarzschild microscope with a wide spectrum and a long working distance was investigated to perform precise assemblage of detectors. We employed a gradient square method to construct the evaluation function for realizing accurate quantitative analysis of image defocusing. By imaging...

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Bibliographic Details
Published in:Applied sciences 2020-07, Vol.10 (13), p.4621
Main Authors: Wang, Chao, Zhang, Tao, Wang, Weibo
Format: Article
Language:English
Subjects:
Accuracy
Accuracy and precision
Analysis
auto focusing
Autofocus cameras
Defocusing
Design
Image processing
Industrial applications
Innovations
Inspection
long working distance
Microscopes
Production processes
reflective objective
Remote sensing
Sensors
Spectra
wide spectral microscopy
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Description
Summary:A mirror-based Schwarzschild microscope with a wide spectrum and a long working distance was investigated to perform precise assemblage of detectors. We employed a gradient square method to construct the evaluation function for realizing accurate quantitative analysis of image defocusing. By imaging a resolution target that corresponded to 228 line pairs per mm, the validity and imaging ability of the system was proven. The results of repeated focusing tests yielded a standard deviation of 0.75 μm, which indicated high performance accuracy for the focusing system. The proposed system has potential applications in industrial inspection and focusing detection.
ISSN:2076-3417
2076-3417
DOI:10.3390/app10134621