100 GHz Silicon-based micro-machined patch antenna and arrays

• Published in: Journal of engineering (Stevenage, England) England), 2019-10, Vol.2019 (19), p.5622-5625
• Main Authors: Liu, Jingtian, Chen, Shuming, Xiao, Ke, Chen, Xiaowen
• Format: Article
• Language: English
• Subjects: 100 GHz Silicon-based micromachined patch antenna; 100 GHz Silicon‐based micromachined patch antenna; 2.8 GHz impedance bandwidth; 2.8 GHz impedance bandwidth; antenna arrays; antenna feeds; antenna radiation patterns; BCB material; Benzocyclobutene polymer material; etching; four-element antenna arrays; frequency 100.0 GHz; frequency 100.0 GHz; frequency 2.8 GHz; frequency 2.8 GHz; IET International Radar Conference (IRC 2018); micromachined BCB-cavity patch antenna; micromachining; microstrip antennas; millimetre wave antennas; patches; silicon; silicon substrate; single antenna
• ISSN: 2051-3305; 2051-3305
• DOI: 10.1049/joe.2019.0241

This study designs a micro-machined BCB-cavity patch antenna and two types of four-element micro-machined antenna arrays at 100 GHz. The patches are fabricated on Benzocyclobutene (BCB) polymer material. The silicon substrate is selective lateral etched under the patch antenna to fabricate a cavity surrounded by metal and filled with BCB material. The BCB-cavity under patches can reduce the excitation of surface waves and enhance the radiation on performance. A single large BCB-cavity is designed to implement the four-element antenna arrays under the consideration of mutual coupling. The proposed single antenna has a 2.8 GHz impedance bandwidth. At 100 GHz, the simulated maximum gain is 6.7 dBi for the single antenna and 13 dBi for the four-element antenna arrays.