Carbon nanotube integration with a CMOS process

This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully invest...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2010-04, Vol.10 (4), p.3857-3867
Main Authors: Perez, Maximiliano S, Lerner, Betiana, Resasco, Daniel E, Pareja Obregon, Pablo D, Julian, Pedro M, Mandolesi, Pablo S, Buffa, Fabian A, Boselli, Alfredo, Lamagna, Alberto
Format: Article
Language:English
Subjects:
Carbon
carbon nanotube sensor
CMOS
CMOS integration
Design
Electrodes
Electronic mail systems
Humidity
Manufacturing
microchip sensor
Reproducibility
Scanning electron microscopy
Semiconductors
Sensors
SWCNT
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Summary:This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully investigated with the CS the effect of humidity and temperature on the electrical transport properties of SWCNTs. The possibility of a large scale integration of SWCNTs with CMOS process opens a new route in the design of more efficient, low cost sensors with high reproducibility in their manufacture.
ISSN:1424-8220
1424-8220
DOI:10.3390/s100403857