Fabrication of a Highly NO2-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography

Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure...

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Published in:Micromachines (Basel) 2023-10, Vol.14 (10), p.1908
Main Authors: Feng, Zhifu, Giubertoni, Damiano, Cian, Alessandro, Valt, Matteo, Ardit, Matteo, Pedrielli, Andrea, Vanzetti, Lia, Fabbri, Barbara, Guidi, Vincenzo, Gaiardo, Andrea
Format: Article
Language:English
Subjects:
Air pollution
Crystal structure
Crystallography
Electrical resistivity
Electron beam lithography
Electrons
gas sensor
Gas sensors
Gases
Hazardous materials
Internet of Things
low power consumption
MEMS
Metal oxides
nanofilm
Nitrogen dioxide
Outdoor air quality
Oxygen enrichment
Pollutants
Power consumption
Sensors
Silicon wafers
Thin films
VOCs
Volatile organic compounds
Zinc oxide
ZnO
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creator Feng, Zhifu
Giubertoni, Damiano
Cian, Alessandro
Valt, Matteo
Ardit, Matteo
Pedrielli, Andrea
Vanzetti, Lia
Fabbri, Barbara
Guidi, Vincenzo
Gaiardo, Andrea
description Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure was used to minimize the geometries of the gas sensor hotplate to a submicron size in order to reduce the power consumption, reaching 100 °C with 0.09 W. The sensing capabilities of the ZnO nanofilm against NO2 were optimized by introducing an enrichment of oxygen vacancies through N2 calcination at 650 °C. The presence of oxygen vacancies was proven using EDX and XPS. It was found that oxygen vacancies did not significantly change the crystallographic structure of ZnO, but they significantly improved the electrical conductivity and sensing behaviors of ZnO film toward 5 ppm of dry air.
doi_str_mv 10.3390/mi14101908
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subjects Air pollution
Crystal structure
Crystallography
Electrical resistivity
Electron beam lithography
Electrons
gas sensor
Gas sensors
Gases
Hazardous materials
Internet of Things
low power consumption
MEMS
Metal oxides
nanofilm
Nitrogen dioxide
Outdoor air quality
Oxygen enrichment
Pollutants
Power consumption
Sensors
Silicon wafers
Thin films
VOCs
Volatile organic compounds
Zinc oxide
ZnO
title Fabrication of a Highly NO2-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography
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