Enhanced thin film analysis via High Resolution RBS using the NEC CARBS system

Advancements in thin film deposition techniques can now produce films of only a few monolayers in thicknesses, with multiple applications emerging in the nano technology field. This maturing manufacturing technique is driving the need for diagnostics tools able to accurately measure depth profiles....

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Bibliographic Details
Published in:EPJ Web of conferences 2022, Vol.261, p.1006
Main Authors: Pollock, Thomas, Alderson, Eric, Berk, Kevin, McQuown, Levon, Kostanovskiy, Ilya, Wang, Peng, Knyazev, Dmitry, Parkin, Stuart S. P.
Format: Article
Language:English
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Summary:Advancements in thin film deposition techniques can now produce films of only a few monolayers in thicknesses, with multiple applications emerging in the nano technology field. This maturing manufacturing technique is driving the need for diagnostics tools able to accurately measure depth profiles. To meet this need, the Compact Automated Rutherford Back-Scattering (CARBS) system is under development at National Electrostatics Corp. (NEC) for nanometer thin film analysis using High-resolution RBS (HRBS) within a 4 x 4meter footprint. We present the recent development of the system and demonstrate a study of HRBS applied to a 30nm CoAl alloy film. We compare the performance of the CARBS system with the conventional NEC HRBS end station and discuss the advantages of HRBS over SIMS method.
ISSN:2100-014X
2100-014X
DOI:10.1051/epjconf/202226101006