Synthesis of Large-Sized van der Waals Layered MoO3 Single Crystals with Improved Dielectric Performance

• Published in: Precision Chemistry 2024-08, Vol.2 (8), p.406-413
• Main Authors: Zhu, Yaqi, Yu, Beiming, Liu, Xin, Zhang, Jialin, Shi, Zhuofeng, Hu, Zhaoning, Bu, Saiyu, Li, Chunhu, Zhang, Xiaodong, Lin, Li
• Format: Article
• Language: English
• ISSN: 2771-9316; 2771-9316
• DOI: 10.1021/prechem.4c00014

The applications of two-dimensional semiconductors strictly require the reliable integration of ultrathin high-κ dielectric materials on the semiconductor surface to enable fine gate control and low power consumption. As layered oxide materials, MoO3 can be potentially used as a high-κ two-dimensional material with a larger bandgap and high electron affinity. In this work, relying on the oxidization of molybdenum chlorides, we have synthesized α-MoO3 single crystals, which can be easily exfoliated into flakes with thicknesses of a few nanometers and sizes of hundreds of micrometers and fine thermal stability. Based on measurement results of conventional metal/insulator/metal devices and graphene based dual-gate devices, the as-received MoO3 nanosheets exhibit improved dielectric performance, including high dielectric constants and competitive breakdown field strength. Our work demonstrates that MoO3 with improved crystalline quality is a promising candidate for dielectric materials with a large gate capacitance in future electronics based on two-dimensional materials.