Study of the Absorption of Electromagnetic Radiation by 3D, Vacuum-Packaged, Nano-Machined CMOS Transistors for Uncooled IR Sensing

There is an ongoing effort to fabricate miniature, low-cost, and sensitive thermal sensors for domestic and industrial uses. This paper presents a miniature thermal sensor (dubbed TMOS) that is fabricated in advanced CMOS FABs, where the micromachined CMOS-SOI transistor, implemented with a 130-nm t...

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Bibliographic Details
Published in:Micromachines (Basel) 2021-05, Vol.12 (5), p.563
Main Authors: Cherniak, Gil, Avraham, Moshe, Bar-Lev, Sharon, Golan, Gady, Nemirovsky, Yael
Format: Article
Language:English
Subjects:
Absorptivity
Boundary conditions
CMOS
Electromagnetic absorption
Electromagnetic radiation
finite difference time domain
Industrial applications
Internet of Things
Machining
Methods
Microelectromechanical systems
Micromachining
optical and electromagnetics simulations
Power
Radiation
Semiconductor devices
Sensors
Silicon substrates
Silicon wafers
Simulation
Smart houses
Software
SOI (semiconductors)
thermal sensors
Thin films
TMOS sensor
Transistors
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Summary:There is an ongoing effort to fabricate miniature, low-cost, and sensitive thermal sensors for domestic and industrial uses. This paper presents a miniature thermal sensor (dubbed TMOS) that is fabricated in advanced CMOS FABs, where the micromachined CMOS-SOI transistor, implemented with a 130-nm technology node, acts as a sensing element. This study puts emphasis on the study of electromagnetic absorption via the vacuum-packaged TMOS and how to optimize it. The regular CMOS transistor is transformed to a high-performance sensor by the micro- or nano-machining process that releases it from the silicon substrate by wafer-level processing and vacuum packaging. Since the TMOS is processed in a CMOS-SOI FAB and is comprised of multiple thin layers that follow strict FAB design rules, the absorbed electromagnetic radiation cannot be modeled accurately and a simulation tool is required. This paper presents modeling and simulations based on the LUMERICAL software package of the vacuum-packaged TMOS. A very high absorption coefficient may be achieved by understanding the physics, as well as the role of each layer.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi12050563