Research Progress of MEMS Inertial Switches

As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial...

Full description

Saved in:
Bibliographic Details
Published in:Micromachines (Basel) 2022-02, Vol.13 (3), p.359
Main Authors: Liu, Min, Wu, Xinyang, Niu, Yanxu, Yang, Haotian, Zhu, Yingmin, Wang, Weidong
Format: Article
Language:English
Subjects:
Accelerometers
Consumption
contact effect
Design
Electrodes
Energy storage
fabrication
Inertial sensing devices
inertial switch
Internet of Things
MEMS
Microelectromechanical systems
Micromachining
Review
sensitive direction
Silicon
Switches
threshold acceleration
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi13030359