Ultrahigh-resolution on-chip spectrometer with silicon photonic resonators

A compact spectrometer on silicon is proposed and demonstrated with an ultrahigh resolution. It consists of a thermally-tunable ultra-high-Q resonator aiming at ultrahigh resolution and an array of wideband resonators for achieving a broadened working window. The present on-chip spectrometer has a f...

Full description

Saved in:
Bibliographic Details
Published in:Opto-Electronic Advances 2022-01, Vol.5 (7), p.210100-210100
Main Authors: Zhang, Long, Zhang, Ming, Chen, Tangnan, Liu, Dajian, Hong, Shihan, Dai, Daoxin
Format: Article
Language:English
Subjects:
integrated photonics
resonator
silicon
spectrometer
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A compact spectrometer on silicon is proposed and demonstrated with an ultrahigh resolution. It consists of a thermally-tunable ultra-high-Q resonator aiming at ultrahigh resolution and an array of wideband resonators for achieving a broadened working window. The present on-chip spectrometer has a footprint as compact as 0.35 mm2, and is realized with standard multi-project-wafer foundry processes. The measurement results show that the on-chip spectrometer has an ultra-high resolution ?λ of 5 pm and a wide working window of 10 nm. The dynamic range defined as the ratio of the working window and the wavelength resolution is as large as 1940, which is the largest for on-chip dispersive spectro-meters to the best of our knowledge. The present high-performance on-chip spectrometer has great potential for high-resolution spectrum measurement in the applications of gas sensing, food monitoring, health analysis, etc.
ISSN:2096-4579
DOI:10.29026/oea.2022.210100