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Evaluation of mechanical properties of Zr–Cu–Al–Ni TFMG using nanoindentation

Nanomechanical properties of thin-film metallic glasses (TFMG) with various thicknesses can be evaluated through nanoindentation experiments. In this study, zirconium based TFMG (Zr-TFMG, Zr65Cu15Al10Ni10) is deposited on various substrates and then, the effects of film thickness and substrate type...

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Bibliographic Details
Published in:Journal of materials research and technology 2021-05, Vol.12, p.2368-2382
Main Authors: Jeong, Uihwan, Han, Jungmoo, Marimuthu, Karuppasamy Pandian, Lee, Youngseo, Lee, Hyungyil
Format: Article
Language:English
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Summary:Nanomechanical properties of thin-film metallic glasses (TFMG) with various thicknesses can be evaluated through nanoindentation experiments. In this study, zirconium based TFMG (Zr-TFMG, Zr65Cu15Al10Ni10) is deposited on various substrates and then, the effects of film thickness and substrate type on material property evaluation are investigated. Free volume model (FVM) is employed to consider the pressure-dependent behavior such as shear band and softening of Zr-TFMG. FVM parameters of Zr-TFMG were determined by matching the numerical load-depth curves with experimental ones. Significant pile-up on Si substrate, while sink-in on soda-lime glass substrate, implies that deformation behavior of Zr-TFMG depends on the substrate type. Growth of free volume with increasing thickness influences the evaluated FVM parameters.
ISSN:2238-7854
DOI:10.1016/j.jmrt.2021.04.030