HIGH-INFORMATION-DENSITY STORAGE SURFACES

The basic structure and expected operational principles of a novel kind of high-density binary data storage mosaic are presented. It will consist of a regular array of about micron-size capacitive storage elements embedded in an array of holes of appropriate geometry in a metal-dielectric-metal sand...

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Bibliographic Details
Main Authors: Preist, R. C, Heynick, L. N, Shoulders, K. R, Myers, R. E, St John, G. A
Format: Report
Language:English
Subjects:
ALUMINUM
CAPACITORS
Computer Hardware
DATA STORAGE SYSTEMS
DIELECTRIC FILMS
ELECTRICAL RESISTANCE
ELECTRON BEAMS
ELECTRON GUNS
MACHINING
MEMORY DEVICES
METAL FILMS
MICROELECTRONICS
MICROSTRUCTURE
MOLYBDENUM
OXIDES
RESOLUTION
SANDWICH CONSTRUCTION
THIN FILM ELECTRONICS
THIN FILM STORAGE DEVICES
THIN FILMS
VAPOR PLATING
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Summary:The basic structure and expected operational principles of a novel kind of high-density binary data storage mosaic are presented. It will consist of a regular array of about micron-size capacitive storage elements embedded in an array of holes of appropriate geometry in a metal-dielectric-metal sandwich. Access to each element for read-in and read-out is to be done with a high-resolution electron beam. Items discussed are procedures for preparing such mosaics by deposition, electron-beam-activated micro-machining of metal and dielectric films. The results of initial experimental investigations are presented. (Author)