SPUTTERING OF STAINLESS STEEL WITH H (+) sub 1 IONS AND THEIR PENETRATION INTO THE SURFACE

The coefficient of sputtering, alpha, of stainless steel, 18N9T, with H(+) sub 1 of 35 keV, and of penetration of the ions into the surface, eta, were detected by the method described previously (loc. cit.). Not the change in the weight of the target, delta P sub t, but the change in the weight of t...

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Bibliographic Details
Main Authors: Borovik,E. S, Katrich,N. P, Nikolaev,G. T
Format: Report
Language:English
Subjects:
HYDROGEN
ION BEAMS
ION BOMBARDMENT
IONS
Metallurgy and Metallography
Mfg & Industrial Eng & Control of Product Sys
Nuclear Physics & Elementary Particle Physics
PENETRATION
SPUTTERING
STAINLESS STEEL
STEEL 1050
SURFACES
TRANSLATIONS
USSR
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Summary:The coefficient of sputtering, alpha, of stainless steel, 18N9T, with H(+) sub 1 of 35 keV, and of penetration of the ions into the surface, eta, were detected by the method described previously (loc. cit.). Not the change in the weight of the target, delta P sub t, but the change in the weight of the collector, delta P sub c, should be used in the calculation of alpha on the other hand, in the calculation of eta the sum of the two should be used: alpha = delta P sub c/ (9.3 x 10 to the minus 23 power i/qt) and eta = (delta P sub c + delta P sub t)/(1.67 x 10 to the minus 24th power i/qt), where i is the current of the beam H(+) sub 1, q is the electron charge, and t is the duration of sputtering. At pressures p < or = 10 to the minus 9th power mm, alpha = 0.009 and eta = 0.5. The effect of CO, O, CH4, CO2, and H2O was detected. Edited trans. of Konferentsiya po Fizike Plazmy (5th) Kharkov, 1964. Magnitnye Lovushki. Doklady (Conference on Plasma Physics. Magnetic Traps. Reports) n.p., 1965 p130-136, by F. Dion.