NEW VACUUM EQUIPMENT FOR DEPOSITING THIN FILMS

A new device for depositing thin metal films in a vacuum is presented, and its application for depositing thin film electrodes on quartz resonators is discussed in detail. The apparatus permits elements to be coated and sealed without exposing them to the atmosphere and makes possible electrodes of...

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Bibliographic Details
Main Authors: Churkin,E. V, Yugov,V. A
Format: Report
Language:English
Subjects:
INDUSTRIAL EQUIPMENT
METAL FILMS
Mfg & Industrial Eng & Control of Product Sys
QUARTZ RESONATORS
SUBSTRATES
THIN FILMS
TRANSLATIONS
USSR
VACUUM APPARATUS
VAPOR PLATING
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Summary:A new device for depositing thin metal films in a vacuum is presented, and its application for depositing thin film electrodes on quartz resonators is discussed in detail. The apparatus permits elements to be coated and sealed without exposing them to the atmosphere and makes possible electrodes of any configuration. It can also be used to adjust oscillation frequency to nominal. (Author) Edited machine trans. of Trudy Metrologicheskikh Institutov (USSR) n90 p112-120 1967.