COMPUTER PROCESSING OF SEM IMAGES BY CONTOUR ANALYSES

Techniques involving the computer processing of scanning electron microscope (SEM) images using a contouring approach have been developed. For each picture from one to six different SEM signals are converted from analog to digital form and recorded on magnetic tape for subsequent computer analysis....

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Bibliographic Details
Main Authors: Matson,William L, McKinstry,Herbert A, Johnson,Gerald G. , Jr, White,Eugene W, McMillan,Ralph E
Format: Report
Language:English
Subjects:
Computer Hardware
COMPUTER PROGRAMMING
Computer Programming and Software
ELECTRON MICROSCOPY
LEAST SQUARES METHOD
MAPPING
OPTICAL IMAGES
OPTICAL SCANNING
PATTERN RECOGNITION
PHOTOGRAMMETRY
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Summary:Techniques involving the computer processing of scanning electron microscope (SEM) images using a contouring approach have been developed. For each picture from one to six different SEM signals are converted from analog to digital form and recorded on magnetic tape for subsequent computer analysis. A program finds and analyzes coordinate arrays representing the reconstructed computer picture. Least squares fitting of the contour arrays to ellipses provides measurements of the aspect ratios and orientations of the picture fields. Line integration techniques produce areas and perimeters. Computer plotting enables both the visual comparison of the reconstructed picture with a photograph of the image on the cathode ray type of the SEM and an estimate of the accuracy of the ellipse fits. (Author)