The Heat Cell

A cell was needed to modify the ellipsometer such that one can change the temperature of the sample in a well controlled atmosphere. A description of the design follows.

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Bibliographic Details
Main Author: Raccah, Paul M
Format: Report
Language:English
Subjects:
CELLS
CONTROLLED ATMOSPHERES
ELLIPSOMETERS
HEAT
Test Facilities, Equipment and Methods
Online Access:Request full text
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Description
Summary:A cell was needed to modify the ellipsometer such that one can change the temperature of the sample in a well controlled atmosphere. A description of the design follows.