Kinetic Effects in the Chemistry of Diamond CVD Source Gases and Implications for Diamond Growth

Perfectly stirred reactor calculations have been carried out on six different gas mixtures containing ethanol, water, methane, acetylene, oxygen, and hydrogen at conditions typical of low-pressure (approx. 1 Torr) diamond chemical vapor deposition (CVD) reactors. For reactors operating under conditi...

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Bibliographic Details
Main Authors: Sinkovits, Robert S, DeVore, C. R, Shamamian, Vasgen A
Format: Report
Language:English
Subjects:
ACETYLENE
CHEMICAL KINETICS
CHEMICAL VAPOR DEPOSITION
CHEMICALS
CHEMISTRY
DIAMOND GROWTH
DIAMONDS
ETHANOLS
FLOW RATE
GASES
GROWTH(GENERAL)
HYDROCARBONS
HYDROGEN
Inorganic Chemistry
KINETICS
MASS FLOW
METHANE
MIXTURES
NUMERICAL ANALYSIS
Organic Chemistry
OXYGEN
PE62712E
Physical Chemistry
REACTOR OPERATION
SCALE
SOURCES
STOICHIOMETRY
TIME
WATER
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Summary:Perfectly stirred reactor calculations have been carried out on six different gas mixtures containing ethanol, water, methane, acetylene, oxygen, and hydrogen at conditions typical of low-pressure (approx. 1 Torr) diamond chemical vapor deposition (CVD) reactors. For reactors operating under conditions in which the flow or diffusive time scales are short compared to the chemical time scales, the selection of viable source-gas mixtures for diamond growth based solely on the overall C-H-O stoichiometry becomes impossible and kinetic effects must be taken into account. Numerical results are presented which show the dependence of the maximum theoretical diamond deposition rate and diamond quality as a function of mass flow rate.