A Fully-Integrated MEMS Preconcentrator for Rapid Gas Sampling (Preprint)

A new type of fully integrated MEMS preconcentrator has been fabricated and tested as a front end for a flame ionization detector (FID). A 1 microliter preconcentrator filled with PEI-coated microposts is integrated with fast microvalves (response time 50 microsecs) and a resistive microheater (ramp...

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Bibliographic Details
Main Authors: Bae, Byunghoon, Yeom, Junghoon, Radadia, Adarsh D, Masel, Richard I, Shannon, Mark A
Format: Report
Language:English
Subjects:
CHEMICAL WARFARE AGENTS
DETECTORS
Electrical and Electronic Equipment
FID(FLAME IONIZATION DETECTOR)
FLAME IONIZATION DETECTOR
FLAMES
GAS CHROMATOGRAPHY
GAS IONIZATION
GASES
INDUSTRIES
MICROELECTROMECHANICAL SYSTEMS
MICROHEATER
MICROVALVE
PE63739E
Physical Chemistry
Plasma Physics and Magnetohydrodynamics
PRECONCENTRATOR
REACTION TIME
SAMPLING
SEPARATION
TIC(TOXIC INDUSTRIAL COMPOUNDS)
TOXIC INDUSTRIAL COMPOUNDS
TOXICITY
Toxicology
VOLATILITY
WUAFRL4H200102
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Summary:A new type of fully integrated MEMS preconcentrator has been fabricated and tested as a front end for a flame ionization detector (FID). A 1 microliter preconcentrator filled with PEI-coated microposts is integrated with fast microvalves (response time 50 microsecs) and a resistive microheater (ramping to 200C in 0.5 second). The integrated preconcentrator can sample a cubic centimeter of gas in 0.2 second at 50 kPa, adsorb targeted species, heat and desorb in 0.5 second, and inject concentrated gaseous species in as small as 50 μs pulses into separation columns in a microscale gas chromatograph (GC), or directly into a detector. The unprecedented speed of this preconcentrator ( 1 second) is enabled by MEMS sizing and fabrication, allowing sniffing of chemical warfare agents, toxic industrial compounds (TICs), and other volatile compounds in seconds, rather than tens of minutes with conventional systems.