Evaluation of Carbon Nanotube Thin Films for Optically Transparent Microwave Applications Using On-Wafer Probing of Corbino Disc Test Structures

We present a generalized technique, involving the on-wafer probing of Corbino disc test structures, for conveniently evaluating conducting films of arbitrary thickness in terms of complex conductivity and related physical parameters. Using this method, we have electrically characterized partially tr...

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Bibliographic Details
Main Authors: Toonen, Ryan C, Doggett, Julia B, Hirsch, S G, Ivill, Mathew P, Ngo, Eric H, Hubbard, Clifford W, Richter, Henning, Sivarajan, Ramesh
Format: Report
Language:English
Subjects:
Atomic and Molecular Physics and Spectroscopy
CARBON NANOTUBES
CORBINO DISCS
DOPING
Electrical and Electronic Equipment
ELECTRICAL PROPERTIES
ELECTROMAGNETISM
FLUORINE
ITO(INDIUM TIN OXIDES)
MICROWAVE SPECTROSCOPY
OPTICAL PROPERTIES
PGMEA(PROPYLENE GLYCOL MONOMETHYL ETHER ACETATE)
Refractory Fibers
SCANNING ELECTRON MICROSCOPY
THIN FILMS
TIN COMPOUNDS
TRANSPARENT CONDUCTORS
WAFERS
ZINC OXIDES
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Summary:We present a generalized technique, involving the on-wafer probing of Corbino disc test structures, for conveniently evaluating conducting films of arbitrary thickness in terms of complex conductivity and related physical parameters. Using this method, we have electrically characterized partially transparent carbon nanotube thin films at DC and microwave frequencies (including the L-, S- and C-bands). Test structures with disc diameters ranging from 50 m to 500 m and disc-to-concentric-ring gaps ranging from 30 m to 150 m were investigated at temperatures ranging from (295.85 +/- 0.62) K to (396.75 +/- 0.72) K. Additionally, we characterized the thin film in terms of its room temperature optical transmission, at wavelengths ranging from 200 to 2500 nm, in order to evaluate this material as an optically transparent microwave conductor. The original document contains color images. Prepared in cooperation with the George Washington University, Washington, D.C., and Nano-C, Inc., Westwood, MA.