Microdetermination of silicon dioxide on the surface by sensors based on perfluorinated proton-conducting membranes

A microdetermination method of silicon dioxide on the silicon surface is studied. In this method, a thin SiO 2 layer is dissolved in an aqueous solution of hydrofluoric acid and then the resulting solution is analyzed with sensors based on perfluorinated proton-conducting membranes. Quantitative det...

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Bibliographic Details
Published in:Technical physics 2012-06, Vol.57 (6), p.865-867
Main Authors: Nikitin, S. E., Terukov, E. I., Timofeev, S. V., Manabaev, N. K.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Experimental Instruments and Technique
Fluorides
Physics
Physics and Astronomy
Sensors
Silica
Silicon
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Summary:A microdetermination method of silicon dioxide on the silicon surface is studied. In this method, a thin SiO 2 layer is dissolved in an aqueous solution of hydrofluoric acid and then the resulting solution is analyzed with sensors based on perfluorinated proton-conducting membranes. Quantitative determination of silicon dioxide remaining on the silicon surface in a quantity as low as 1 × 10 −6 mol is demonstrated to be feasible.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784212060199