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Deposition of thin [Bi.sub.2][Te.sub.3] and [Sb.sub.2][Te.sub.3] films by pulsed laser ablation
[Bi.sub.2][Te.sub.3] and [Sb.sub.2][Te.sub.3] films were obtained by pulsed laser ablation. The films were deposited in vacuum (1 x [10.sup.-5] Torr) on single crystal substrates of [Al.sub.2][O.sub.3] (0001), Ba[F.sub.2] (111), and fresh cleavages of KCl or NaCl (001) heated to 453-523 K. The films...
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Published in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2010-04, Vol.44 (4), p.544 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | [Bi.sub.2][Te.sub.3] and [Sb.sub.2][Te.sub.3] films were obtained by pulsed laser ablation. The films were deposited in vacuum (1 x [10.sup.-5] Torr) on single crystal substrates of [Al.sub.2][O.sub.3] (0001), Ba[F.sub.2] (111), and fresh cleavages of KCl or NaCl (001) heated to 453-523 K. The films were 10-1500 nm thick. The structures of the bulk material of targets and films were studied by X-ray diffractometry and transmission high-energy electron diffraction, respectively. Electrical properties of the films were measured in the temperature range of 77-300 K. It is shown that the films possess semiconductor properties. Several activation portions are observed in the temperature dependences of resistivity; the energies of activation portions depend on the film thickness and crystallite size. DOI: 10.1134/S1063782610040238 |
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ISSN: | 1063-7826 |
DOI: | 10.1134/S1063782610040238 |