Capacitor structures based on strontium titanate films

The structural properties of strontium titanate films and the electrical parameters of the related capacitor structures have been investigated. It has been found that the deposition temperature exerts a direct effect on the phase composition of the films, the degree of perfection of the crystal stru...

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Bibliographic Details
Published in:Physics of the solid state 2012-05, Vol.54 (5), p.968-971
Main Authors: Tumarkin, A. V., Gaidukov, M. M., Razumov, S. V., Gagarin, A. G.
Format: Article
Language:English
Subjects:
Capacitors
Crystals
Electronic components industry
Physics
Physics and Astronomy
Proceedings of the XIX All-Russian Conference on Physics of Ferroelectrics (VKS-XIX)
Solid State Physics
Strontium
Structure
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Summary:The structural properties of strontium titanate films and the electrical parameters of the related capacitor structures have been investigated. It has been found that the deposition temperature exerts a direct effect on the phase composition of the films, the degree of perfection of the crystal structure, and the internal stresses in the lattice. The strontium titanate films deposited at a temperature of 800°C are single-phase, have a rather perfect crystal structure, and possess minimum internal stresses. It has been shown that the capacitor structures based on oriented strontium titanate films provide a twofold decrease in the level of dielectric loss as compared to similar structures based on barium strontium titanate solid solution films at a frequency of 1.5 GHz.
ISSN:1063-7834
1090-6460
DOI:10.1134/S1063783412050435