Development of Model Series of Plate-Measuring Engines

Experience gained in the design of a series of modern plate-measuring engines, including those with submicrometric accuracy, is described. The technical characteristics, structural designs, and features of the software packages of the engines are presented.

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Bibliographic Details
Published in:Measurement techniques 2014-03, Vol.56 (12), p.1364-1369
Main Authors: Masterenko, D. A., Emel’yanov, P. N., Koval’skii, M. G., Baikovskii, A. Yu, Alabin, S. Yu
Format: Article
Language:English
Subjects:
Analytical Chemistry
Characterization and Evaluation of Materials
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
Online Access:Get full text
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Description
Summary:Experience gained in the design of a series of modern plate-measuring engines, including those with submicrometric accuracy, is described. The technical characteristics, structural designs, and features of the software packages of the engines are presented.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-014-0383-6