Determination of optical properties and thickness of nanolayers from the angular dependences of reflectance

The possibility of multiparametric determination of properties of structures from the data on the dependence of reflectances R p and R s for polarized radiation and ratio R p / R s on the angle of incidence θ and from the angular dependence 1/ R p (Δ R /Δθ) is investigated. The results of natural an...

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Bibliographic Details
Published in:Technical physics 2010-10, Vol.55 (10), p.1478-1483
Main Authors: Bilenko, D. I., Sagaidachnyi, A. A., Galushka, V. V., Polyanskaya, V. P.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Optics
Physics
Physics and Astronomy
Quantum Electronics
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Summary:The possibility of multiparametric determination of properties of structures from the data on the dependence of reflectances R p and R s for polarized radiation and ratio R p / R s on the angle of incidence θ and from the angular dependence 1/ R p (Δ R /Δθ) is investigated. The results of natural and computer experiments revealed a high sensitivity of the angular dependence R p (θ) of the reflectance to the values of optical constants and thickness of layered structures. Quantitative results of multiparametric measurements are verified by the independent method of spectral ellipsometry. The possibility of multiparametric determination of the properties and thickness of nanometer dielectric, metallic, and semiconducting layers on various substrates and the properties of substrates in such structures is established.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784210100130